EITRE^®

Semi-automated Nanoimprint Lithography R&D tools

An easy-to-use semi-automated and affordable range of tools for substrate sizes up to 8” x 8”, allowing pattern replication on the micro- and nanometer scale. The EITRE^® systems are particularly versatile because of the multiple imprint process capabilities and the wide range of configuration possibilities.

SINDRE^® Integra

Fully automated Nanoimprint Lithography tools

A fully automated nanoimprint lithography tool suitable for high-volume manufacturing within several application areas with throughput of up to 70 WPH. Allows for imprint size up to 12” wafers. Because of its high repeatability, low maintenance cost and high yield the SINDRE^® Integra tool provides a competitive Cost-of-Ownership

EITRE^® Large Substrates

Semi-automated Tool “Semi-automated Nanoimprint Lithography Tool for Large Substrates”

Nanoimprint tool for substrates up to 500 x 500 mm. This semi-automated tool enables high accuracy patterns with resolutions down to 50 nm  to be replicated large substrates with excellent repeatability . The system offers the highest possible flexibility using different imprint processes in the same equipment, allowing a wide range of materials to be used.

SINDRE^® Litho Track

Fully integrated Nanoimprint Lithography system

Fully integrated and automated NIL system with substrate clean, coat and thermal processing in one and the same tool and with throughput up to 30 WPH. Allows for imprint sizes up to 12” wafers and larger substrates on request.

QUICKSTEP

Semi-automated coater developer tools

Semi-automatic stand-alone tools for coating and developing. The Quickstep tools represents a cost efficient range of tools for 200 or 300 mm wafers or for large substrates up to 1500 mm in diameter. The Quickstep tools are versatile with a wide range of configuration possibilities.

MICROCLUSTER

Fully automated coater and developer

The Microcluster tool is available in 200- or 300-mm versions and is a fully automated cassette-to-cassette coater developer. The Microcluster tool is configured with four modules and offers high flexibility and represents the ideal configuration for R&D and pilot production needs meeting industry requirements with excellent uniformity and process repeatability. .

MICROCLUSTER TRACK

Fully automated coater and developer track tools

The Microcluster Track tools are available in 200-, 300- or up to 1500 mm versions and are fully automated cassette-to-cassette coater developers. The Microcluster tool is configured with five modules or more and giving it a high level of versatility and adaptability which makes it very suitable for High Volume Manufacturing needs meeting industry requirements with superior uptime, process repeatability, high yield and competitive Cost-of-Ownership.

QUICKSTEP WET

Semi-automated wet processing tools

The Obducat Quickstep Wet tools are stand-alone wet processing tools for cleaning, lift-off, etching or developing. A wide selection of options make these tools highly configurable to fit the customer needs in processing a 200- and 300 mm wafers as well as large substrates up to 1500 mm in diameter.

MICROCLUSTER WET

Fully automated wet processing tools

The Microcluster WET tool is available in 200- or 300-mm versions and is a fully automated cassette-to-cassette wet processing solution. The Microcluster WET tool is configured with four modules which can be dedicated to performing cleaning-, lift-off-, etching- or developing processes. The Microcluster WET tools offers high flexibility and represents the ideal configuration for R&D and pilot production needs meeting industry requirements with

MICROCLUSTER WET TRACK

Fully automated wet processing Track tools

The Microcluster WET Track tools are available in 200-, 300- or up to 1500 mm versions and are fully automated cassette-to-cassette wet processing solutions. The Microcluster WET tools are configured with five modules or more which can be dedicated to performing cleaning-, lift-off-, etching- or developing processes. The Microcluster WET Track tools offers a high level of versatility and adaptability which makes it very suitable for High Volume Manufacturing needs meeting industry requirements with superior uptime, process repeatability, high yield and competitive Cost-of-Ownership.